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Fracture Strength Characterization of the Die Active Side and Back Side for a Realistic Die Crack Assessment
2021
Journal of Engineering Research and Reports
This paper discusses the characterization of an integrated circuit (IC) silicon die fracture strength to have a realistic die crack assessment. The evaluation was conducted using a 3-point bend test setup to measure the die strength of actual IC dies. Both the active side and the back side of the IC die were tested for 2 types of dies with different active side circuit layout. Results showed that the difference in the die active side circuit layout or structure has impact on die strength. It
doi:10.9734/jerr/2021/v20i217267
fatcat:3t3lgguydrbxpc5vc5frofbbl4