A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2022; you can also visit the original URL.
The file type is application/pdf.
Melt Flow during Silicon Crystal Growth
シリコン単結晶製造時における融液の流れ
1994
Journal of Japan Society of Fluid Mechanics
シリコン単結晶製造時における融液の流れ
Preserved Fulltext
