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World Tribology Congress III, Volume 1
With the emergence of micro-and nano-technology, the contact mechanics of MEMS & NEMS devices and components is becoming more important. The motivation for this work is to gain a better understanding of the role of coatings and thin films on micro-and nano-scale contact phenomena, and to understand the interactions of measurement devices, such as an Atomic Force Microscope (AFM), with layered media. The frictionless contact between a rigid spherical indenter and an elastic layered medium is thedoi:10.1115/wtc2005-63382 fatcat:6jtce5jd7vct7bycrngpife4du