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Dual-Stage Piezoelectric Nano-Positioner Utilizing a Range-Extended Optical Fiber Fabry–Perot Interferometer
2007
IEEE/ASME transactions on mechatronics
This paper proposes a new modulation scheme using high-order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a fiber Fabry-Perot interferometer to serve as a displacement sensor, which has two operation modes-coarse and fine modes. Integrating the afore-developed sensor, a piezoelectric actuator, and a scheduled proportional-integral/adaptive-sliding controller, we construct a dual-stage nanopositioning system. The experimental results
doi:10.1109/tmech.2007.897264
fatcat:zhaiqxwrarg3hptutiraw5aony