A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf
.
A comparison study of the logic of four wafer fabrication simulators
1996
Proceedings of the 28th conference on Winter simulation - WSC '96
Many semiconductor manufacturing companies use one of the following four simulators to aid in analyzing, planning, and operating their manufacturing facilities: Tyecin Systems' ManSim/X, AutoSimulations'
doi:10.1145/256562.256896
fatcat:4zi4jv2qlvez3g5fcfgnflifa4