A comparison study of the logic of four wafer fabrication simulators

Scott J. Mason, Paul A. Jensen, John W. Fowler
1996 Proceedings of the 28th conference on Winter simulation - WSC '96  
Many semiconductor manufacturing companies use one of the following four simulators to aid in analyzing, planning, and operating their manufacturing facilities: Tyecin Systems' ManSim/X, AutoSimulations'
doi:10.1145/256562.256896 fatcat:4zi4jv2qlvez3g5fcfgnflifa4