Generation of Micro-Scale Reactive Plasmas and Development of Their New Applications - Present and Future of Research and Development on Microplasmas - 2.Generation of Microplasmas
ミクロ反応場の生成と応用 -マイクロプラズマ研究の現状と将来展望- 2.マイクロプラズマの生成

Shozo ISHII, Hidenori AKIYAMA, Akimitsu HATTA
2004 Journal of Plasma and Fusion Research  
doi:10.1585/jspf.80.827 fatcat:plsko376ujbrdhsvulxujpyrti