Phase-controlled synthesis of ZrO2nanoparticles for highly transparent dielectric thin films

Tarik Ali Cheema, Georg Garnweitner
2014 CrysteEngComm  
The synthesis of ZrO 2 nanoparticles with controlled phase contents of the monoclinic and tetragonal polymorphs is presented. By increasing the reaction temperature the quantity of the tetragonal phase rises from 20% to almost 100%, with additional dependence on the liner material of the reactor. Additionally, it is shown that by a simple post-synthetic chemical modification the nanoparticles can be dispersed in propylene glycol monomethyl ether acetate without the presence of agglomerates. The
more » ... obtained dispersions can then be employed to fabricate thin film based capacitors via low-temperature solution processing. Hence, the effect of the phase composition on the dielectric properties of the thin films is also elucidated. 3366 | CrystEngComm, 2014, 16, 3366-3375 This journal is 531 3919615 † Electronic supplementary information (ESI) available: PXRD, DLS and TGA measurements as well as dielectric loss factors. See
doi:10.1039/c3ce42392a fatcat:acamjf23fzh37lzjmhfldkqml4