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Experimental Study on Electrostatically Actuated Micro-Gripper Based on Silica Process
2017
World Journal of Engineering and Technology
The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition and image processing, voltage-displacement characteristic curve is obtained and the mathematical equation is established. The analysis of the characteristic equation has shown the consistency and rationality of the theoretical design and the experimental results. The main factors
doi:10.4236/wjet.2017.54b014
fatcat:ehrbp3ve3rfj5inbngnkmx7ada