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Diamond lateral growth is a powerful technique for the design and fabrication of diamond-based power electronic devices. Growth orientation affects the diamond deposition in terms of growth rate, surface roughness, and impurity incorporation. It has been shown that the finally grown surface of a patterned substrate can be predesigned based on the growth conditions. Thus, simultaneous growth along different surface orientations yields regions with different properties. In line with this, thedoi:10.1063/5.0031478 fatcat:tyu4wobjq5cnjo4ab6ib5ec22u