Gas sensing properties of SnO2 thin films and binary systems compounds

Leena F. Hamza, Bushra A. Hasan
2019 Journal of Physics, Conference Series  
The thin films of SnO2,SnO2:TiO2 , SnO2:MoO3 , SnO2:WO3 , SnO2:Cr2O3 , and SnO2: Fe2O3 were prepared by pulsed laser deposition technique using (Nd:YAG) laser of λ=1064 nm average frequency (6) Hz and pulse duration (10 ns) under vacuum of 10 -2 mbar)deposited on glass, n-Si single crystals substrate room temperature with thickness of (100±10) nm. The structures of pure SnO2 and ,SnO2:TiO2 , SnO2:MoO3 , SnO2:WO3 , SnO2:Cr2O3 , SnO2:Co3O4 compounds were studied by X-ray diffraction .the results
more » ... howed that there was red shift accompanied addition of MoO3 and TiO2 while a blue shift accompanied the addition of WoO3 , Cr2O3 , Fe2O3 to tin oxide . The gas sensing measurements of NO2 gas showed that SnO2:TiO2 thin films prepared on n-Si substrate have better sensitivity than thin films from the other binary compounds . Maximum sensitivity (231.4%) was obtained from SnO2:TiO2 thin film prepared on n-Si substrate at operating temperature 373K .
doi:10.1088/1742-6596/1178/1/012024 fatcat:4nicopaglzesbi3etursdv73w4