Femtosecond pulsed laser direct write production of nano- and microfluidic channels

Joel P. McDonald, Vanita R. Mistry, Katherine E. Ray, Steven M. Yalisove
2006 Applied Physics Letters  
Nano-and microfluidic channels were produced by selectively delaminating 1200 nm thermally grown oxide films ͑SiO 2 ͒ films from Si͑100͒ substrates using a femtosecond pulsed laser. Single pass channels exhibiting bell-like cross sections with widths of 24 m and heights of 355 nm were directly written at a speed of 1 cm/ s, while larger channels ͑320 m in width and ϳ15 m in height͒ were produced by laterally overlapping single pass channels. The results of an investigation of the interior
more » ... the interior surfaces of the channels via atomic force microscopy and scanning electron microscopy are presented.
doi:10.1063/1.2201620 fatcat:hqjdz2j7dfgndoy6wop6j5rvm4