IEEE Sensors, 2005.
A model is developed to map the variation of sensitivity of a Surface Acoustic Wave (SAW) resonator sensor over its surface, in order to find the region with maximum sensitivity. The model is based on a combined Coupling of Modes (COM) and periodic Green's function analysis. In order to extend the analysis to layered media, a new efficient technique is introduced to account for the mechanical interactions with buried electrodes. Using this technique the sensitivity calculations are found to bedoi:10.1109/icsens.2005.1597928 fatcat:3uosffbufjeeziuzgabhkqxmd4