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A Novel Multilayered AlN Crystal Growth Structure
2018
DEStech Transactions on Computer Science and Engineering
A method and reactor for preparing aluminum nitride crystals with multi-source material is proposed. That is, a new type of controllable feeding structure for a plurality of source materials, by changing the structure of a conventional crystal reactor, it is possible to grow at least two kinds of crystals separately without changing the growth conditions to form a multi-layered structure of ABABA... The multi-layered structure allows the thickness of the grown crystal to be controlled within a
doi:10.12783/dtcse/pcmm2018/23647
fatcat:yllj7u3rhbcbvp5wshvcitbbtm