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Nanoimprint Lithography: Toward Functional Photonic Crystals
[chapter]
2015
Organic and Hybrid Photonic Crystals
In this chapter we review the use of nanoimprint lithography and its derivative soft-lithography techniques for the fabrication of functional photonic crystals. Nanoimprint is a viable, scalable, and cost-effective solution for large area patterning. While initially it relied primarily on pattern transfer from a rigid mold to a thermally softened polymer by embossing, in the last two decades the process evolved rapidly, giving rise to new technologies that allow direct imprint of functional
doi:10.1007/978-3-319-16580-6_9
fatcat:op254meetrfannrmwwwhp3l6fy