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Proceedings of the 2010 American Control Conference
In high speed AFMs the vertical axis of the sample positioning stage requires high bandwidth feedback control. In these systems the dynamics of the piezoelectric actuator, its support structure and load play a dominant role in the design of the feedback loop. System performance can be increased by avoiding the excitation of resonant modes of the piezoelectric actuator by modal actuation. In this approach, the piezoelectric actuator is modified to render modes close to the controller bandwidthdoi:10.1109/acc.2010.5531425 fatcat:w4ysdwao5nfiflrpe3y7skjgjy