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Optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope
2017
Precision engineering
General rights This document is made available in accordance with publisher policies. Please cite only the published version using the reference above. Full terms of use are available: a b s t r a c t This paper describes the optimisation of a nano-positioning stage for a Transverse Dynamic Force Microscope (TDFM). The nano-precision stage is required to move a specimen dish within a horizontal region of 1 m × 1 m and with a resolution of 0.3 nm. The design objective was to maximise positional
doi:10.1016/j.precisioneng.2017.05.005
fatcat:xl4jacxotrhvxjilt4e7rwjy5e