Chemical Reaction in Preparation of Sr(Zr0.2Ti0.8)O3 Dielectric Thin Film by RF Magnetron Sputtering

Tomizo MATSUOKA, Yosuke FUJITA, Jun KUWATA, Atsushi ABE
1988 Journal of the Ceramic Society of Japan  
doi:10.2109/jcersj.96.1167 fatcat:4e7mqaqo4bcrjc3kafbwkjaghu