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In situ metrology to characterize water vapor delivery during atomic layer deposition

Tariq Ahmido, William A. Kimes, Brent A. Sperling, Joseph T. Hodges, James E. Maslar
2016 Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films  

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doi:10.1116/1.4948360 fatcat:lmnmmwi5azfh7jevnichieip3y
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Tariq Ahmido, William A. Kimes, Brent A. Sperling, Joseph T. Hodges, James E. Maslar. "In situ metrology to characterize water vapor delivery during atomic layer deposition." Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films 34.3 (2016) 031512