A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2014; you can also visit the original URL.
The file type is
This article describes a fabrication procedure of high performance flexible ferroelectric materials supported on plastic substrates and the characterization of BaTiO 3 thin films on flexible substrates. Ferroelectric BaTiO 3 thin film was deposited using radiofrequency magnetron sputtering on a Pt/Ti/SiO 2 /͑100͒ Si substrate and annealed at 700°C for crystallization. The metal-insulator ͑BaTiO 3 ͒-metal structure was successfully transferred onto flexible substrates by the standarddoi:10.1149/1.3407622 fatcat:rajxukwg6bgstmv6m4zdz5qgfy