Recent progress on ECVD Project. Progress report for 15 April--15 July 1994 [report]

1994 unpublished
Recent experimental results obtained for enhanced CVD are reported below. These experiments included (1). The distribution of deposition rates of various powders on the substrate in the reactor; (2). Comparison of deposition rates of CVD and enhanced CVD; (3). Evaluation of the mechanical properties of ECVD with commercial powders and ultra fine powders produced by plasma vapor deposition method.
doi:10.2172/10175858 fatcat:dxlor3ybwbb4jf7wp2j4f7vjc4