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Recent progress on ECVD Project. Progress report for 15 April--15 July 1994
[report]
1994
unpublished
Preserved Fulltext
Recent experimental results obtained for enhanced CVD are reported below. These experiments included (1). The distribution of deposition rates of various powders on the substrate in the reactor; (2). Comparison of deposition rates of CVD and enhanced CVD; (3). Evaluation of the mechanical properties of ECVD with commercial powders and ultra fine powders produced by plasma vapor deposition method.
doi:10.2172/10175858
fatcat:dxlor3ybwbb4jf7wp2j4f7vjc4