Characterization of the Surface Oxide Layer Formed on a Titanium Alloy Material for Ultrahigh Vacuum

Etsuhiro MUNEYAMA, Masatoshi TAKEDA, Atsuhiro KUNISHIGE, Hamazou NAKAGAWA, Keita SHIROUZU, Hiroyuki NII, Hiroki KURISU, Setsuo YAMAMOTO, Mitsuru MATSUURA
2007 Shinku  
The surface oxide layer of a titanium alloy treated by mechanochemical polishing (MCP) was characterized using a scanning electron microscope (SEM), transmission electron microscope (TEM), atomic force microscope (AFM), X-ray photoelectoron spectoroscopy (XPS), auger electoron spectoroscopy (AES) and secondary ion mass spectrometry (SIMS). The results showed that surface oxide layer was amorphous titanium oxide and had about 5 nm thickness. At the interface between surface oxide layer and
more » ... ate, there was a region of high hydrogen concentration. In the same region, the Ti F chemical component was found. It seems that this interface layer acts as a barrier for the bulk hydrogen diŠusion, and gives low hydrogen concentration at the surface layer resulting in the low outgassing property in the titanium materials.
doi:10.3131/jvsj.50.53 fatcat:ovpzflhijrfubklzg3wcd5v2la