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Noise robustness of interferometric surface topography evaluation methods. Correlogram correlation

Ilia Kiselev, Egor I Kiselev, Michael Drexel, Michael Hauptmannl
2017 Surface Topography Metrology and Properties  

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2017 pre-print arXiv:1703.05570v1 fatcat:2zz6y74zd5abtntrkpe5hdzz2y
In this paper we promote a method for the evaluation of a surface topography which we call the correlogram correlation method. Employing a theoretical analysis as well as numerical simulations the method is proven to be the most accurate among available evaluation algorithms in the common case of uncorrelated noise. Examples illustrate the superiority of the correlogram correlation method over the common envelope and phase methods.
doi:10.1088/2051-672x/aa9459 fatcat:p2rqtyxkbfbf5mukelz2ff33vm
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Ilia Kiselev, Egor I Kiselev, Michael Drexel, Michael Hauptmannl. "Noise robustness of interferometric surface topography evaluation methods. Correlogram correlation." Surface Topography Metrology and Properties 5.4 (2017) 045008