A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is application/pdf.
Kenji NOMURA, Yukari ISHIKAWA, Noriyoshi SHIBATA. "Crystallinity of AlN Film Deposited by Reactive Sputtering Method." Journal of the Ceramic Society of Japan 102.1191 (1994) 1079-1081