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Temperature dependence of mechanical stiffness and dissipation in ultrananocrystalline diamond
2009
Micro- and Nanotechnology Sensors, Systems, and Applications
Ultrananocrystalline diamond (UNCD) films are promising for radio frequency micro electro mechanical systems (RF-MEMS) resonators due to the extraordinary physical properties of diamond, such as high Young's modulus, quality factor, and stable surface chemistry. UNCD films used for this study are grown on 150 mm silicon wafers using hot filament chemical vapor deposition (HFCVD) at 680°C. UNCD fixed free (cantilever) resonator structures designed for the resonant frequencies in the kHz range
doi:10.1117/12.822795
fatcat:4ujwapqwujerjgdknhrtzbsi5a