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A ruthenium oxide thin film electrode with an average specific capacitance of 650 F/g and good high rate capability was prepared by electrostatic spray deposition ͑ESD͒. This technique is a one-step process of preparing ruthenium oxide thin film electrode compared with a multistep sol-gel process and has features of low-temperature synthesis and easy control of surface morphology. While as-prepared hydrous ruthenium oxide (RuO 2 •xH 2 O) thin film was in an amorphous phase, the hydrousdoi:10.1149/1.1359936 fatcat:asi55lxio5edlbr23oifzkmwnm