Nano-structure fabrication and manipulation by the cantilever oscillation of an atomic force microscope

C.K. Hyon, S.C. Choi, S.W. Hwang, D. Ahn, Yong Kim, E.K. Kim
Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference  
Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.
doi:10.1109/imnc.1999.797471 fatcat:uej2mzfthjak3ky4myf55e23nu