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Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference
Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.doi:10.1109/imnc.1999.797471 fatcat:uej2mzfthjak3ky4myf55e23nu