The deposition of calcium fluoride nanoparticles on single crystal chips of calcium fluoride was studied. CaF2 nanoparticles were synthesized by co-precipitation from aqueous nitrate solutions using hydrofluoric acid as a fluorinating agent at a batch system. The prepared samples were examined by atomic force microscopy, scanning electron microscopy, transmission electron microscopy and optical transmission. There is an inhomogeneous coating of the substrate surface with submicron particles of

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... bout 100–150 nm in size, which are clusters of nanoparticles of 15-20 nm in size. The initial nanoparticles coherently grow on the surface of the crystal substrate. Heat treatment of the substrate-deposited layer composite at 600 °C leads to the coalescence of submicron particles and the formation of a porous layer of a complex structure.