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This research is motivated by a scheduling problem found in the diffusion and oxidation areas of semiconductor wafer fabrication facilities. With respect to some practical motivated process constraints, like equipment dedication and unequal batchsizes, we model the problem as unrelated parallel batch machines problem with incompatible job families and unequal ready times of the jobs. Our objective is to minimize the total weighted tardiness (TWT) of the jobs. Given that the problem is NPhard,doi:10.1109/wsc.2009.5429173 dblp:conf/wsc/KlemmtWAM09 fatcat:gijphzmanrebzdnbuiakecyxjm