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Surface Functionalization Utilizing Mesoporous Silica Nanoparticles for Enhanced Evanescent-Field Mid-Infrared Waveguide Gas Sensing
2021
Coatings
This work focuses on the development of nanoparticle-based layer-by-layer (LbL) coatings for enhancing the detection sensitivity and selectivity of volatile organic compounds (VOCs) using on-chip mid-infrared (MIR) waveguides (WGs). First, we demonstrate construction of conformal coatings of polymer/mesoporous silica nanoparticles (MSNs) on the surface of Si-based WGs using the LbL technique and evaluate the coating deposition conditions, such as pH and substrate withdrawal speed, on the
doi:10.3390/coatings11020118
fatcat:g237e7pgnnedlazdxbxmc4m4qm