Radio frequency and microwave plasma for optical thin-film deposition

Juergen Otto, Volker Paquet, Ralf T. Kersten, Heinz-Werner Etzkorn, Raymond M. Brusasco, Jerald A. Britten, Jack H. Campbell, J. B. Thorsness, Richard I. Seddon
1990 Optical Thin Films III: New Developments  
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doi:10.1117/12.22371 fatcat:abraho5psbatlepzbfssmgausi