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Fabrication of Submicron Structures on Transparent Quartz Glasseswith Improved Optical Properties

Dongyang Zhou, Litong Dong, Ziang Zhang, Mengnan Liu, Ying Wang, Yuegang Fu, Zuobin Wang
2019 Zenodo  

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This paper presents a method for the fabrication of submicron structures on transparent quartz glasses to improve optical properties. In this work, the submicron structures were fabricated by two-beam dual exposure laser interference lithography (LIL) and inductively coupled plasma-reactive ion etching (ICP-RIE). The reflectance of less than 5% and the transmittance of more than 95% were achieved in the visible and infrared range of light from 490nm to 1100nm. The experiment results have shown
more » ... hat this method is simple and efficient for the large-area fabrication of submicron structures on transparent quartz glasses with improved optical properties for many applications such as optical components and devices in optical engineering.
doi:10.5281/zenodo.2644017 fatcat:3mcextm3dnbyjjdgkwbkppsjzm
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Dongyang Zhou, Litong Dong, Ziang Zhang, Mengnan Liu, Ying Wang, Yuegang Fu, Zuobin Wang. "Fabrication of Submicron Structures on Transparent Quartz Glasseswith Improved Optical Properties." Zenodo (2019)