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The crystallinity, surface morphology and topography of the femtosecond pulsed laser deposited Nd:YAG film under in-situ and post deposition heat treatment were examined. Heat treatment improved the crystallinity of the film with the increase in the reflecting planes shown in X-ray diffraction data. Scanning electron micrograph of the heat treated film surface indicates a small degree of melting. Surface topography of the as-deposited Nd:YAG film under AFM shows size variation to within fewdoi:10.1380/ejssnt.2017.25 fatcat:fcradillljfxdf6rnzfuucp2fq