An increasing number of experiments in the field of low energy ion physics (< 25 keV/charge) requires pulsed beams of highly charged ions. Whereas for high-intensity beams (> µA) a pulsed beam chopper, installed downstream to the analyzing dipole, is used. For low-intensity beams (< 100 nA) the ion intensity delivered during the pulse may be increased by operating the ECR discharge in the afterglow mode [1]. This method gives satisfactory results (ie average current during the beam pulse is

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... er than the current in the CW mode) for high charge state ions. In this paper, we report on results of the afterglow mode for beams of 22 Ne q+ , 36 Ar q+ and 84 Kr q+ ions. Furthermore, a new promising "Micro Pulsed Beam" mode will be described with encouraging preliminary results for 84 Kr 27+ and 36 Ar 17+ ions. PACS N°: 07.77.Ka, 29.25.Ni, 52.25.Jm Keywords: plasma ion sources, electron cyclotron resonance, afterglow discharge, particle beam bunching a Contributed paper, published as part of the