Electrically actuated sacrificial membranes for valving in microsystems

M Allain, J Berthier, S Basrour, P Pouteau
2010 Journal of Micromechanics and Microengineering  
Valving is essential to microflow circuits in microsystem technology. Many different types of valves have already been designed. Membranes of sacrificial material have already been studied for one shot valving; however, the new design proposed here, based on sacrificial micro-membranes with embedded electrodes, has the advantages to be efficient, easy to pilot and can connect easily one by one a series of initially isolated microchambers implemented in a silicon chip.
doi:10.1088/0960-1317/20/3/035006 fatcat:4n7hu6iiajhbfgwy4dblhrro4q