A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2020; you can also visit the original URL.
The file type is application/pdf
.
Development of High Power Silicon Membrane Thermoelectric Generator with Phononic Nano-structures by using Nanoimprint
ナノインプリントによるフォノニックナノ構造シリコン薄膜熱電デバイスの高出力化
2019
The Proceedings of the Thermal Engineering Conference
ナノインプリントによるフォノニックナノ構造シリコン薄膜熱電デバイスの高出力化