A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL. The file type is application/pdf.
application/pdf
Kyojiro MORIKAWA, Kazuki MATSUSHITA, Takehiko TSUKAHARA. "Rapid Plasma Etching for Fabricating Fused Silica Microchannels." Analytical Sciences 33.12 (2017) 1453-1456