Rapid Plasma Etching for Fabricating Fused Silica Microchannels

Kyojiro MORIKAWA, Kazuki MATSUSHITA, Takehiko TSUKAHARA
2017 Analytical Sciences  
doi:10.2116/analsci.33.1453 pmid:29225239 fatcat:g4tgw3dtbvfofloelxz63oz5iq