Boron-enhanced diffusion of boron from ultralow-energy boron implantation [report]

A. Agarwal, D.J. Eaglesham, H.J. Gossmann, L. Pelaz, S.B. Herner, D.C. Jacobson, T.E. Haynes, Y.E. Erokhin
1998 unpublished
doi:10.2172/650277 fatcat:lwxsugtlcfc4ho35m4ytyg2uay