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Au/SiO 2 nanocomposite films, studied in this work, were prepared by RF-magnetron sputtering technique on glass substrate at room temperature under two different substrate temperatures (Ts), and subsequent heat treatment. For the deposited sample at T S = 25˚C, no apparent surface plasmon resonance peak could be observed. After annealing, optical absorption spectrum of the Au/SiO 2 thin films showed a broad absorption band around 500 nm relating to gold nanoparticles without any modification indoi:10.4236/oalib.1103909 fatcat:pzk5nzyn3rb5bdfq3vwnt43jmq