Optical and structural properties of LaF_3 thin films

Martin Bischoff, Dieter Gäbler, Norbert Kaiser, Andrey Chuvilin, Ute Kaiser, Andreas Tünnermann
2007 Applied Optics  
LaF 3 thin films of different thicknesses were deposited on CaF 2 (111) and silicon substrates at a relatively low substrate temperature of 150°C. Optical (transmittance, reflectance, refractive index, and extinction coefficient) and mechanical (morphology and crystalline structure) properties have been investigated and are discussed. It is shown that LaF 3 thin films deposited on CaF 2 (111) substrates are monocrystalline and have a bulklike dense structure. Furthermore, it is presented that
more » ... w-loss LaF 3 thin films can be deposited not only by boat evaporation but also by electron beam evaporation.
doi:10.1364/ao.47.00c157 pmid:18449239 fatcat:jpbsi2cosjaozfe3olbqy4fvxy