High-temperature gas sensor using perovskite thin films on a suspended microheater

O. Grudin, R. Marinescu, L. M. Landsberger, M. Kahrizi, G. Frolov, J. D. N. Cheeke, S. Chehab, M. Post, J. Tunney, X. Du, D. Yang, D. Segall
2002 Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films  
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more » ... d microheater Grudin, O.; Marinescu, R.; Landsberger, L. M.; Kahrizi, M; Frolov, G.; Cheeke, D. J. N.; Chehab, S.; Post, Michael; Tunney, Jim; Du, Xiaomei; Yang, Dongfang; Segall, D. https://publications-cnrc.canada.ca/fra/droits L'accès à ce site Web et l'utilisation de son contenu sont assujettis aux conditions présentées dans le site Suspended microstructures consisting of a thin oxide/nitride diaphragm with embedded polysilicon heaters were designed and fabricated using a standard complementary metal-oxide-semiconductor process and simple postprocessing. Thin films of gas sensitive materials based on the SrFeO 2.5ϩx nonstoichiometric perovskite family were deposited onto the diaphragms by room-temperature pulsed excimer laser deposition. Successful chemical sensor functionality was demonstrated. With applied power up to 30 mW, estimated temperatures of the gas sensor film up to 900°C were reached. When the device was exposed to volatile organic compounds ͑VOCs͒ such as acetone and methanol, a reversible ten to 100-fold increase in sensor film resistance was observed, with response times from less than1st oaf e wminutes. Sensor response sensitivity depended on applied power and on the nature of the VOC analyte. This sensor device has the potential for use in multiarray configurations such as in an electronic nose.
doi:10.1116/1.1463072 fatcat:cssxbptkarb2jhrtp2ctpjhrcu