Effect of a field-limiting method in a micro-area analysis by SIMS
投影型二次イオン質量分析装置を用いた微小領域測定における制限視野法の効果

Kazuteru TAKAHASHI, Kazuhiro WATANABE, Akio TAKANO, Susumu NAGAYAMA, Masahiro KUDO
1991 Bunseki Kagaku  
doi:10.2116/bunsekikagaku.40.11_863 fatcat:d2xba5embva7jfvp2ukww3xzjy