Proposal of a Reliability-Based Design Method for Static and Fatigue Strength of MEMS Micromirror
MEMSマイクロミラーの静的強度と疲労強度に対する信頼性設計手法の提案

Satoshi IZUMI, Masayuki KADOWAKI, Shinsuke SAKAI, Yuzuru UEDA, Atsushi SUZUKI
2006 Journal of the Society of Materials Science Japan  
doi:10.2472/jsms.55.290 fatcat:aduqa2q4kbf3tni5qx7767llri