Internet Archive Scholar

1515 Numerical Evaluation of Dislocation Accumulation in ULSI Cells of Reduced Gate Length
1515 ULSIセルゲート長の微細化にともなう転位蓄積の数値的評価(OS15.電子デバイス・電子材料と計算力学(4),オーガナイズドセッション)

Michihiro SATO, Tetsuya OHASHI, Takuya MARUIZUMI, Isao KITAGAWA
2009 The Proceedings of The Computational Mechanics Conference  

Preserved Fulltext

fulltext thumbnail
Web Archive Capture PDF (437.9 kB)
https://web.archive.org/web/20220527062953/https://www.jstage.jst.go.jp/article/jsmecmd/2009.22/0/2009.22_732/_pdf

A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2022; you can also visit the original URL. The file type is application/pdf.

doi:10.1299/jsmecmd.2009.22.732 fatcat:iaaaztgnvjcejl2wt5ze2g77dm
Citation

Michihiro SATO, Tetsuya OHASHI, Takuya MARUIZUMI, Isao KITAGAWA. "1515 Numerical Evaluation of Dislocation Accumulation in ULSI Cells of Reduced Gate Length." The Proceedings of The Computational Mechanics Conference 2009.22.0 (2009) 732-733