Quantitative Analysis of Heterogenous Samples by SEM/EDS

John Konopka
2015 Microscopy and Microanalysis  
It is well established that samples for quantitative analysis by SEM/EDS must be flat, conductive and homogeneous [1]. However, many analysts are often forced to estimate the composition of a complex sample and their only tool is the standardless quantitative analysis button. Also, one hears that a spectrum from a large field of view produces an average result. The point of this work is to document this problem and offer some suggestions and guidance. The algorithms for quantitative corrections
more » ... assume a sample with a uniform composition. If the element distribution is not uniform then the wrong correction factors are calculated and applied resulting in a wrong result.
doi:10.1017/s1431927615008946 fatcat:c2psawcgmvhz3gcuml5gloqfyy