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Magnetron sputtering was applied to grow FePt granular film on a silicon substrate. A MgO interlayer was in-between the film and substrate to induce the L1 0 structure in the FePt alloy film with fct texture. The carbon addition helps reduce the grain size of the film. XRD, SQUID and TEM were applied to measure its structure, magnetic properties, and microstructures, respectively. Results show that the film has excellent L1 0 order, and the squareness of MH loop is close to unity, with a highdoi:10.12677/ms.2016.64032 fatcat:6m3nzwhbibfnfcehc2kmv7m54m