FIB-SEM NANOFABRICATION- A REVIEW

P. Ramesh, K V L N Murthy
2020 EPRA international journal of research & development  
Based on unique FIB and precision stage technology as well as a novel nanofabrication platform, the Raith FIB-SEM is designed around the FIB as the primary patterning technique, supported by uncompromised SEM and laser interferometer stage capabilities. Such a FIB-centric state-of-the-art nanofabrication system allows scientists to take advantage of the unique capabilities afforded by focused ions. This paper discusses various capabilities and key strengths, based on exemplary applications from different nanopatterning areas.
doi:10.36713/epra5209 fatcat:ul3d2u5d5feirlpusid7mlbm6e