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The local model fitting (LMF) method is a useful single-shot surface profiling algorithm that features fast measurement speed and robustness against vibration. However, the measurement range of the LMF method (i.e., measurable height difference between two neighboring pixels) is limited up to a quarter of the light source wavelength. To cope with this problem, the multiwavelength-matched LMF (MM-LMF) method was proposed, where the plain LMF method is first applied individually to interferencedoi:10.1364/ao.51.006700 pmid:23033084 fatcat:hdnleczcjbcjvey3uweg3i3rhu