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This article describes a historical view of the role of surface analysis by Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectroscopy. These surface analysis methods have given many fruitful information for the material characterization especially for failure analysis. Now many standard procedures for the surface analysis have been achieved and published over 38 standard documents from International Standards for Organization.doi:10.1380/jsssj.32.238 fatcat:67m6bwptbrdl7i4lkbk7q3bqmu