Effect of spurious reflection on phase shift interferometry

Chiayu Ai, James C. Wyant
1988 Applied Optics  
The phase errors caused by spurious reflection in Twyman-Green and Fizeau interferometers are studied. A practical algorithm effectively eliminating the error is presented. Two other algorithms are reviewed, and the results obtained using the three algorithms are compared. The authors are with
doi:10.1364/ao.27.003039 pmid:20531883 fatcat:i23cmhhzyre45onnxdufd3cs6e