Internet Archive Scholar

Ultrasonically driven surface micromachined motor

V. Kaajakari, S. Rodgers, A. Lal
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)  

Preserved Fulltext

fulltext thumbnail
Web Archive Capture PDF (1.0 MB)
https://web.archive.org/web/20030523172111/http://www.cae.wisc.edu:80/~sonicmem/research/actuation/mems2000_web.pdf

A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2003; you can also visit the original URL. The file type is application/pdf.

The first-ever all-surface micromachined ultrasonic micro-rotor is presented. The rotor is actuated by electrically driving a piezoelectric PZT (lead-zirconate-titanate) plate mounted at the back of the silicon die eliminating the need for interconnects and space consuming surface actuators. The rotor operates with a single phase subfive volt peak-to-peak excitation in atmospheric pressure. The piezoelectric plate is adhesively mounted making the method suitable for actuating micromachines from
more » ... any surface micromachine process. Two different modes of operation are demonstrated: pulsed and resonant. The pulse actuation results in low rotation rate (0.5-3 RPM) while resonant actuation results in a fast rotation (10-100 RPM). The ability to drive a geared down rotor (50:7), much smaller than the driving rotor, indicates high torque output capability.
doi:10.1109/memsys.2000.838487 fatcat:a3dtmxxlu5a57pc7axrkztlxey
Citation

V. Kaajakari, S. Rodgers, A. Lal. "Ultrasonically driven surface micromachined motor." Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)